The PSM-PM series Permanent magnet low temperature probe is a probe platform specially developed for low temperature vertical magnetic field electrical measurement environment, providing 0.The 5T vertical magnetic field can carry out repeatable and standard electrical experiments on 2-inch, 4-inch and wafer, and different external test equipment can complete the electrical characteristics measurement, parameter measurement, DC measurement, RF measurement and Hall measurement of the device。

Permanent magnet low temperature probe table main features:

1, permanent magnet low temperature probe table, cavity vacuum can reach 10E-4torr within 15 minutes, liquid nitrogen consumption is small, down to low temperature only 0.2L slag chlorine, easy to use and economical。
2. The base of the probe arm is fixed by magnet adsorption, and the unique X-Y-Z-R four-dimensional adjustment of the probe arm can meet the test of 4-inch samples。
3, the sample seat can be placed 4 inches larger wafer samples, by moving the slide table below the sample seat, can achieve a large X-Y axis ±100mm moving stroke, and the sample seat itself can be fine-adjusted in four dimensions, making sample testing and sample change more convenient。
4. The vacuum chamber is made of aluminum material, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test。
5. The probe arm adopts three-coaxial connector with good leakage performance and measured leakage current less than 100fA@1V@80K--800K。
6, the permanent magnet adopts electric sliding table control, which can realize the forward and backward reversing movement。
7, the permanent magnet bracket and the probe table adopt separate isolation bracket to avoid vibration conduction to the sample when the magnet is moving。
8, Wide test temperature range, large support 80K-800K continuous temperature change。
9. The top cover adopts clamshell structure, making changing sample more convenient。