CN/ EN

Product center

PRODUCT CENTER

HX80N series semi-automatic probe station

HX80N series semi-automatic probe station

The HX80N series semi-automatic probe table is a custom-made integrated probe table for sensor wafer testing with excellent test accuracy. It can be combined with customized instrumentation systems to perform tests such as photoelectric sensors, pressure sensors and gas sensors。

HX80N series semi-automatic probe table product overview

  The HX80N series semi-automatic probe table is a custom-made integrated probe table for sensor wafer testing with excellent test accuracy. It can be combined with customized instrumentation systems to perform tests such as photoelectric sensors, pressure sensors and gas sensors。


Software function introduction
• Can test wafer, test range is optional, support interlace sampling and ring test MAP can be edited test;
• Support bad point retest;
• With offline and synchronous functions;
• With contact buffer function, stable needle marks;
• Operation accuracy compensation function to ensure the stability of the test;
• Test yield, total, speed display;
• CCD image automatic alignment and positioning;
• The equipment has a certain anti-interference ability, support high and low temperature test, stable operation;
• Multi-bin classification test, test data can be stored, can be exported, compatible with the format of post-channel devices, with data statistical analysis function;
• Operator, administrator, system manufacturer rights management functions

HX80N series semi-automatic probe table technical parameters

Parameters and indicators:

Performance name
Technical index
Diameter can be measured
6″、12″
XY table
结构
Linear motor
行程
350mm × 400mm, resolution: 1μm
速度
> 150mm/s
Positioning accuracy
≤±2μm
Bearing table
z-stroke
10mm, resolution: 1μm
Z-station accuracy
≤±1μm
z-resolution
≤±0.5μm
θ adjustment range
±25°
Theta resolution
0.006°
Microscope/video display system
Binocular stereo microscope/Optional triocular microscope and CCD real-time video display device

Optional accessories